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| Download - Detail |
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| Model: |
MSQ |
| Title |
Surveyor MSQ 1.4 SUR1 |
| Description: |
Fixes the following problems: 1) the MSQ did not turn off at the end of a sequence when instructed to do so; 2) Chromellion software does not run the second entry of a sequence. 3) Changes default values for RF lens bias, ion energy values, cone voltage, and probe temperature. Relaxes the tolerance for temperature readback to allow operation at high temperatures. |
| Date: |
9/8/2005 |
| File Type: |
SP/SUR |
| File Size: |
3.1MB |
| Download Now: |
/peg/MSQ14SUR1.zip |
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